ãã¹ãŠã®é»åã·ã¹ãã ã«ã¯ã¿ã€ãã³ã° ããã€ã¹ãå¿ èŠã§ãããããŠãå€ãã®å Žåãæ°Žæ¶ (XTAL) å ±æ¯åšãé Œãã«ãªããœãªã¥ãŒã·ã§ã³ãšãªããŸãããã ããçºæ¯åšãšçºæ¯åš IC ãçµã¿åãã㊠1 ã€ã®å®å šãªçµ±åã¿ã€ãã³ã° ããã€ã¹ãæ§æããçºæ¯åšã«ã¯ãXTAL ãšæ¯èŒããŠããã€ãã®å©ç¹ããããŸãããããã®å©ç¹ã¯ã MEMS ã¿ã€ãã³ã°æè¡ã«ãã£ãŠããã«æ¡åŒµãããŸããã·ã¹ãã èšèšè ã¯ãXTAL ã®å¶éãåé¿ããããã¯ãªã¹ã¿ã«ã䜿çšããèšèšã®é çããªã¹ã¯ãåãå ¥ããå¿ èŠããªããªããŸããã


1. ãã©ã°ã¢ã³ããã¬ã€ã®çºæ¯åšã«ããã·ã¹ãã èšèšãç°¡çŽ åãããŸã
衚é¢äžãç¹ã«ãã®æè¡ã®æç床ãèæ ®ãããšãæ°Žæ¶ã䜿çšããçºæ¯åšã®èšèšã¯ç°¡åã«èŠãããããããŸãããããããæ°Žæ¶ãçºæ¯åè·¯ã«é©åãããéã«ã¯ãèæ ®ãã¹ãèšèšãã©ã¡ãŒã¿ãç¡æ°ã«ãããŸãããããã®ãã©ã¡ãŒã¿ã«ã¯ãæ°Žæ¶ã®åäœã€ã³ããŒãã³ã¹ãå ±æ¯ã¢ãŒããé§åã¬ãã«ãããã³çºæ¯åšã®ã²ã€ã³ã®å°ºåºŠã§ããçºæ¯åšã®è² æ§æµæãªã©ããããŸããããã«ã䞊åå ±æ¯ã¢ãŒãã®æ°Žæ¶ã§ã¯è² è·å®¹éãèæ ®ããå¿ èŠããããPCB ã®å¯ç容éãšãçºæ¯åè·¯ã«å«ãŸããå¯èœæ§ã®ãããªã³ãããéç©å®¹éãèæ ®ããå¿ èŠããããŸãã
åè·¯ã®ä¿¡é Œæ§ã®é«ãèµ·åãšåäœãä¿èšŒããã«ã¯ãããããã¹ãŠã®ãã©ã¡ãŒã¿ãæ éã«èæ ®ããå¿ èŠããããŸããçºæ¯åè·¯ã§ã¯å ±æ¯åšãšçºæ¯åè·¯ã®å³å¯ãªæŽåãå¿ èŠãªãããæ°Žæ¶ã®ãã³ããŒã¯æ°Žæ¶ã®èµ·åãä¿èšŒã§ããŸãããå¯Ÿç §çã«ããªã·ã¬ãŒã¿ãŒã¯å®å šã«çµ±åããããœãªã¥ãŒã·ã§ã³ã§ããçºæ¯åšã¡ãŒã«ãŒã¯æ°Žæ¶æ¯ååãçºæ¯åšåè·¯ã«é©åããããããåºæ¿èšèšè ã®ãã®è² æ ã軜æžããŸãããããã³ã°ãšã©ãŒãæé€ããããããçºæ¯åšã®èµ·å㯠SiTime ã«ãã£ãŠä¿èšŒãããŸããã€ãŸããçºæ¯åšã¯ã·ã¹ãã èšèšãå€§å¹ ã«ç°¡çŽ åãããã©ã°ã¢ã³ããã¬ã€ã®ãœãªã¥ãŒã·ã§ã³ã§ãã
MEMSçºæ¯åšã§èšèšäžã®æžå¿µãè§£æ¶
æ°Žæ¶ã®åäœã€ã³ããŒãã³ã¹ãšçºæ¯åšã®è² æ§æµæ
çºæ¯åè·¯ã«ã¯ããã«ã¯ããŠãŒã³ã®çºæ¯åºæºãæºããã®ã«ååãªã²ã€ã³ãšäœçžã·ãããå¿ èŠã§ããç¹ã«éèŠãªã®ã¯ãæ°Žæ¶ã®åäœã€ã³ããŒãã³ã¹ (ESR) ãšçºæ¯åšã®è² æ§æµæ (ã²ã€ã³ã«çžåœ) ã§ããçºæ¯åšã®ã²ã€ã³ãæ°Žæ¶å ±æ¯åã®åäœã€ã³ããŒãã³ã¹ãå æããã«ã¯äžååãªå Žåãåè·¯ãèµ·åããªãå¯èœæ§ããããŸãããããã®åé¡ã¯ãçºæ¯åšã䜿çšããããšã§è§£æ±ºãããŸãã
æ°Žæ¶å ±æ¯ã¢ãŒããåšæ³¢æ°å調容éããªã³ããããªã·ã¬ãŒã¿å®¹é
æ°Žæ¶æ¯ååã¯çŽåå ±æ¯ã¢ãŒããŸãã¯äžŠåå ±æ¯ã¢ãŒãã§å ±æ¯ã§ããŸãããéåžžã¯ããã 2 ã€ã®ã¢ãŒãã®ãã¡ã® 1 ã€ã«å¯ŸããŠã®ã¿æ ¡æ£ãããŸãã䞊åå ±æ¯çšã«æ ¡æ£ãããŠããå Žåãéåžžã¯æå®ãããŠããç¹å®ã®è² è·å®¹éãå¿ èŠã§ãããã ããé©åãªéé»å®¹éã䜿çšãããŠããªããšãåšæ³¢æ°èª€å·®ãããŒã¿ã·ãŒãã®ä»æ§ãè¶ ããå¯èœæ§ããããŸããçºæ¯åš IC ã«ã¯éç©ããã容éãããå Žåãšãªãå Žåããããæè¯ã®åšæ³¢æ°ç²ŸåºŠã確ä¿ããã«ã¯ãçºæ¯åš IC ã®ããªã³ãåºæ¿æ¥ç¶ããã³ã ã¯ã€ã€ãããã³ãªãŒã ãã¬ãŒã ããã®å¯ç容éãšãšãã«èæ ®ããå¿ èŠããããŸãã
å¯Ÿç §çã«ãMEMS çºæ¯åšã¯ãå ±æ¯åšãšçºæ¯åš/PLL IC ã 1 ã€ã®ããã±ãŒãžã«çµ±åããŠãããããå ±æ¯åšæ³¢æ°ã調æŽããããã®å€éšã³ã³ãã³ãµãå¿ èŠãããŸããã
ã¯ãªã¹ã¿ã«ãã©ã€ãã¬ãã«
çºæ¯åè·¯ãæ°Žæ¶æ¯ååããªãŒããŒãã©ã€ãããªãããã«æ³šæããå¿ èŠããããŸããå ±æ¯åšããªãŒããŒãã©ã€ããããšãæ°Žæ¶å ±æ¯åšã®å£åãå éããå¯èœæ§ããããæ¥µç«¯ãªã¬ãã«ã§ã¯æ°Žæ¶ãæå·ããå¯èœæ§ããããŸããå¯Ÿç §çã«ãMEMS å ±æ¯åšã¯çµå¹Žå£åãèµ·ãããŸããã

2. MEMSçºæ¯åšã¯å質ãšä¿¡é Œæ§ãã¯ããã«åªããŠããŸã
å質ãšä¿¡é Œæ§ã¯éåžžã«éèŠã§ããäŒç€Ÿã®è©å€ãå±éºã«ãããããã ãã§ãªããããçŽãã«ã¯ã³ã¹ããšæéããããå¯èœæ§ããããŸããããã«ãå±å€ã«å±éãããç°å¢ã¹ãã¬ã¹ã«ãããããã·ã¹ãã ã¯ãç¹ã«å ç¢ã§ããå¿ èŠããããŸããæ°Žæ¶å ±æ¯åšã¯æçããæè¡ã§ã¯ãããŸãããéåžžã¯ã€ãªã³ ããŒã ã§éå±é»æ¥µãã¢ãã¬ãŒã·ã§ã³ããããšã«ãã£ãŠãåã ã®å ±æ¯åšãç®çã®åšæ³¢æ°ã«èª¿æŽããããªãè€éãªè£œé ããã»ã¹ãå¿ èŠã§ãããã®ã¹ãããã¯çµæ¶ãã«ãã»ã«åãããåã«è¡ããããããå ±æ¯åšãæ±æããããããªããŸãããã®ããã»ã¹ãšä»ã®ã¯ã©ãŒã補é ã®è€éãã«ãããã¯ã©ãŒãã®å¹³åæ ééé (MTBF) 㯠1,400 äžæéãã 3,800 äžæéãšããäœãã«ãªããŸããæ¬ é¥éšå/çŸäžåç (DPPM) ã¯ãæé«ã®ã¯ã©ãŒã ã¡ãŒã«ãŒã§ã¯æå€§ 50ããã£ã¢ 2 ã¯ã©ãŒã ãµãã©ã€ã€ãŒã§ã¯ 150 ã«éããŸãã
æ°Žæ¶ã®ç¹æ®ãªè£œé ããã»ã¹ãšã¯å¯Ÿç §çã«ãMEMS çºæ¯åšã¡ãŒã«ãŒã¯æšæºçãªåå°äœããã ã¢ãŒãæè¡ã䜿çšããŸããããã«ã¯ãå ±æ¯åšãšçºæ¯åš IC ã®ãŠã§ã ã¬ãã«ã®è£œé ãããã³ãã©ã¹ãã㯠ã«ãã»ã«åã«ããæšæºãªãŒã ãã¬ãŒã ãžã®ã〠ãã³ãã£ã³ã°ãå«ãŸããŸãã SiTime MEMS å ±æ¯åšãã€ã¯ãçŽç²ãªã·ãªã³ã³ã®åäžã®æ©æ¢°æ§é ããäœãããŠããŸãã SiTime MEMS ã®è£œé äžããšãã·ãŒã« ããã»ã¹ã䜿çšããŠå ±æ¯åšãæŽæµãããã®åŸããªã·ãªã³ã³ãå ç©ããŠæ§é ãå°æ¢ããŸããè¶ ã¯ãªãŒã³ãªããŒã¡ããã¯ç空ã·ãŒã«ã«ãããå ±æ¯åšæ§é ãä¿è·ãããæ±æããè§£æŸãããçµå¹Žå£åã®ã¡ã«ããºã ãæé€ãããŸãã
ãã®çµæãSiTime çºæ¯åšã® DPPM ãš MTBF ã¯æ°Žæ¶ãããçŽ 30 ååªããŠãããå³ããç°å¢ã¹ãã¬ã¹ã«èãããšã³ããŠãŒã¶ãŒã«é«å質ã®è£œåãæäŸããéåžžã«ä¿¡é Œæ§ã®é«ãæè¡ãã©ãããã©ãŒã ãæäŸããŸãã

3. MEMS äœåšæ³¢çºæ¯åšã¯åºæ¿å æé¢ç©ã 65% åæž
çºæ¯åšã¯å®å šã«çµ±åããããœãªã¥ãŒã·ã§ã³ã§ããã黿ºãã«ãããªã³ã° ãã£ãããªã©ã®å€éšã³ã³ããŒãã³ãã¯å¿ èŠãããŸããã SiTime ã® 1.5 mm x 0.8 mm (1508) ã®èšçœ®é¢ç©ã¯ãæå°ã®æ°Žæ¶æ¯ååã®èšçœ®é¢ç© 1.6 mm x 1.2 mm ãããå°ããã§ãããŸãã32 kHz æ°Žæ¶æ¯ååã«å¿ èŠãªè² è·ã³ã³ãã³ãµãèæ ®ãããšãXTAL ãœãªã¥ãŒã·ã§ã³ã®åèšåºæ¿é¢ç©ã¯ 3 å以äžå€§ãããªããŸãã

4. çºæ¯åšã¯è€æ°ã®è² è·ãé§åã§ãããããã³ã¹ããBOMãåºæ¿ã¹ããŒã¹ãåæžãããŸãã
çºæ¯åšã¯ãéåžžãé§å匷床ã«å¿ã㊠2 ïœ 3 ã€ã®è² è·ãé§åã§ããåºåãã©ã€ããŒãåããã¢ã¯ãã£ãåè·¯ã§ããããã«ãããçºæ¯åšã§è€æ°ã®æ°Žæ¶æ¯ååãšããã«é¢é£ããã³ã³ãã³ãµã眮ãæããããšãã§ããBOMãã·ã¹ãã ã³ã¹ããåºæ¿é¢ç©ãããã«åæžãããŸãã

5. MEMS çºæ¯åšã¯ EMI ã®åœ±é¿ãéåžžã«åãã«ãã
ã»ãšãã©ã®ã·ã¹ãã ã§äžè¬çãªé»ç£ãšãã«ã®ãŒã¯ãæ°Žæ¶æ¯ååãçºæ¯åè·¯ãå«ã IC ã«æ¥ç¶ããé²åºãã PCB é ç·ã«ãã£ãŠæŸãããå¯èœæ§ããããŸãããã®ãã€ãºã¯çºæ¯åè·¯ã«çµåãããåºåã«æž¡ãããå¯èœæ§ããããã·ã¹ãã ã«ãžãã¿ãŒããã€ãºãå ããå¯èœæ§ããããŸãããã ããçµ±åçºæ¯åšã§ã¯ãå ±æ¯åšãšçºæ¯åš IC ã®éã«é²åºãã PCB æ¥ç¶ããªããMEMS å ±æ¯åšã IC ã«æ¥ç¶ãããã³ãã¯ã€ã€ãŸãã¯ããŒã«ã¯éåžžã«çãã§ããããã«ãããMEMS çºæ¯åšã¯ EMI ã«å¯ŸããæåºŠãå€§å¹ ã«äœããªããŸããæ¬¡ã®è¡šãšããããã«ç€ºãããã«ãSiTime çºæ¯åšã¯æ°Žæ¶çºæ¯åšãããæå€§ 11.3 dBm (ç·åœ¢ã¹ã±ãŒã«ã§ 134 å) æåºŠãäœããªããŸãã

ãã®ãã¹ãã¯ã詊éšå¯Ÿè±¡ããã€ã¹ (DUT) ãåãä»ããããŠããæšªé»ç£ (TEM) ã»ã«ã«é»ç£ãšãã«ã®ãŒãæ³šå ¥ãã IEC 62132-2 èŠæ Œã«åŸã£ãŠå®è¡ãããŸããã
6. MEMS çºæ¯åšã¯æ¯åã®åœ±é¿ãéåžžã«åãã«ãã

ç¡ç·åºå°å±ãã¹ã¢ãŒã«ã»ã«ãªã©ãéåžžã«å®å®ããåšæ³¢æ°ãå¿ èŠãšããäžéšã®ã·ã¹ãã ã§ã¯ãæ¯åã«ããã·ã¹ãã é害ããµãŒãã¹ã®äžæãçºçããå¯èœæ§ããããŸãã
MEMS æ¯ååã®è³ªéã¯æ°Žæ¶æ¯ååã®è³ªéã«æ¯ã¹ãŠçŽ 1,000 ïœ 3,000 åã® 1 ã§ãããããMEMS çºæ¯åšã¯èæ¯åæ§ãåããŠããŸããããã¯ãè¡æãæ¯åãªã©ã«ãã£ãŠ MEMS æ§é ã«äžããããç¹å®ã®å é床ããåçã®æ°Žæ¶ãããã¯ããã«å°ããªåãšãªãããããã£ãŠã¯ããã«äœãåšæ³¢æ°ã·ãããåŒãèµ·ããããšãæå³ããŸãã 5 ããŒãžã®å³ã¯ãSiTime MEMS çºæ¯åšã¯æ°Žæ¶çºæ¯åšãšæ¯èŒããŠæ¯åæåºŠã 10 åã® 1 以äžäœã (åªããŠãã) ããšã瀺ããŠããŸãããã®æ°å€ã¯ååæ°Žæ¶å ±æ¯åã§ã¯ãªãæ°Žæ¶çºæ¯åšã®æž¬å®ã«åºã¥ããŠããŸãããæ°Žæ¶å ±æ¯åã§ãåçã®çµæãæåŸ ãããããšã«æ³šæããŠãã ããã
7. MEMS çºæ¯åšã¯ããããåšæ³¢æ°ã§ããã«å©çšå¯èœ
ã¯ã©ãŒãã®äŸçµŠã€ã³ãã©ã«ã¯ããã€ãã®å¶çŽãããããã®ãããªãŒãã¿ã€ã ã 12 ïœ 16 é±éçšåºŠããããã¯ãã以äžãããå ŽåããããŸããå¶çŽã® 1 ã€ã¯ãã»ã©ãã㯠ããã±ãŒãžã®ãµãã©ã€ã€ãŒã®æ°ãéãããŠããããšã§ãããã 1 ã€ã®å¶çŽã¯ãå©çšã§ããåšæ³¢æ°ãªãã·ã§ã³ãéãããŠããããšã§ããæ°Žæ¶è£œåã§ã¯ãããã°ã©ããã«äœçžãã㯠ã«ãŒã (PLL) ã䜿çšãããªãéãããã¹ãŠã®åšæ³¢æ°ã«ç°ãªãæ°Žæ¶ã«ãããå¿ èŠã§ãããããã£ãŠãæšæºå€ã®åšæ³¢æ°ã®å Žåã¯ãªãŒãã¿ã€ã ãéåžžã«é·ããªãå¯èœæ§ããããŸãã

æ°Žæ¶å ±æ¯åšãšã¯å¯Ÿç §çã«ãMEMS å ±æ¯åšã¯æšæºçãªå ±æ¯åšæ§æã«åºã¥ããŠããŸãã MEMS çºæ¯åšã®åºååšæ³¢æ°ã¯ãPLL ãããŸããŸãªä¹ç®å€ã«ããã°ã©ã ããããšã«ãã£ãŠçæãããŸããããã«ããã6 æ¡ã®ç²ŸåºŠã§éåžžã«åºãåšæ³¢æ°ç¯å²ãå¯èœã«ãªããŸããããã«ãã·ãªã³ã³ MEMS çºæ¯åšã¯ãæšæºçãªåå°äœããã»ã¹ãšããã±ãŒãžã³ã°ã䜿çšããŠè£œé ãããŸãã MEMS çºæ¯åšãã³ããŒã¯éåžžã«å€§èŠæš¡ãªåå°äœæ¥çã®ã€ã³ãã©ã¹ãã©ã¯ãã£ã掻çšããŠããããã容éã¯äºå®äžç¡å¶éã§ãã
MEMS çºæ¯åšã®ãµã³ãã«ã¯ãæšæºå€ã®åšæ³¢æ°ã§ãã£ãŠã 1 æ¥ä»¥å ã«ããã°ã©ã ããŠå ¥æã§ããŸãã SiTime ã®äœã³ã¹ãã®Time Machine II ããã°ã©ããšãã£ãŒã«ã ããã°ã©ããã«çºæ¯åšã䜿çšããããšã§ãèšèšè ã¯ç 究宀ã§çºæ¯åšãå³åº§ã«ããã°ã©ã ããŠãããã€ã¹ã®åäœç¯å²å ã§ä»»æã®åšæ³¢æ°ãä»»æã®é»æºé»å§ãä»»æã®å®å®æ§ãåããããã€ã¹ãäœæã§ããŸããçç£ãªãŒãã¿ã€ã ã¯ããã 6 ïœ 8 é±éã§ãã
8. 補åãã¡ããªãŒå šäœã«å¯Ÿã㊠1 ã€ã®èªå®è³æ Œ
ã³ã³ããŒãã³ããæçµçšé (ã·ã¹ãã ) æ¡ä»¶ã«é©åãããã«ã¯ãããªãã®æéãšãªãœãŒã¹ãæ¶è²»ãããå¯èœæ§ããããŸãããã ããMEMS çºæ¯åšã䜿çšãããšãèªå®ã®åŽåã軜æžã§ããŸãã SiTime 補åã¯ãåºæ¬è£œåãã¡ããªãŒå ã®åããã€ã¹ãåºç¯å²ã®åšæ³¢æ°ãäŸçµŠé»å§ãå®å®æ§ãçæã§ããããã«ããããã°ã©ã å¯èœãªãã©ãããã©ãŒã ã«åºã¥ããŠããŸããããšãã°ãç¹å®ã®åºååšæ³¢æ°ã§ SiTime ããã€ã¹ãèªå®ããããã«ãªãœãŒã¹ãæè³ãããŠãããæ°ããããŒãèšèšã§å¥ã®åšæ³¢æ°ãå¿ èŠãªå Žåãæ¢åã®èªå®ããŒã¿ãæ°ããåšæ³¢æ°ã®éšåã«æ¡åŒµã§ããŸãã
å¯Ÿç §çã«ãå XTAL åšæ³¢æ°ã«ã¯ç°ãªãæ°Žæ¶ãã©ã³ã¯ãå¿ èŠã§ãããŸããèšèšã§ 60 MHz ãè¶ ããåšæ³¢æ°ãå¿ èŠãªå Žåã¯ãåºæ¬ã¢ãŒãæ°Žæ¶ä»¥å€ã®å¥ã®æè¡ã䜿çšãããããšããããããŸãã第äžå鳿°Žæ¶ã¯ãããé«ãåšæ³¢æ°ã«ãã䜿çšãããŸãããã®ã¢ãŒãã§ã¯ãä¿¡é Œæ§ã®é«ãèµ·åãä¿èšŒããããã«è¿œå ã®èª²é¡ (ã€ãŸããåºæ¬ã¢ãŒããããé«ãåäœã€ã³ããŒãã³ã¹ãšç°ãªãçºæ¯åè·¯) ãçºçããå¯èœæ§ããããããã«ã¯èªå®ãå¿ èŠã§ãã

ãŸãšã
åºæã®å¶éã«ãããããããæ°Žæ¶ã¯æ°å幎ã«ããã£ãŠé»åã¿ã€ãã³ã°ã®æšæºãšãªã£ãŠããŸããã SiTime ã® MEMS çºæ¯åšã¯ãããã®å¶éãå æããåŸæ¥ã®æ°Žæ¶æ¯ååãšæ¯èŒããŠå€ãã®å©ç¹ãæäŸããŸããèšèšè ã¯ãXTAL ã«äŒŽãé çã®çš®ãå¶éãåãå ¥ããå¿ èŠããªããªããŸããã
XTAL ã MEMS çºæ¯åšã«çœ®ãæãã䞻㪠8 ã€ã®çç±ã¯æ¬¡ã®ãšããã§ãã
- çºæ¯åšã¯ããã©ã°ã¢ã³ããã¬ã€ãã§ã - èšèšãã¯ããã«ç°¡åã§ãèµ·åãä¿èšŒãããŠããŸã
- 30 ååªããå質ãšä¿¡é Œæ§ â ã³ã¹ããåæžããå ç¢æ§ãåäž
- ããã±ãŒãžãå°ããããã£ããããªããå°ãªã - PCB é¢ç©ãåæžããã
- 2 ïœ 3 åã®æ°Žæ¶æ¯ååã眮ãæããŠè€æ°ã®è² è·ãé§å â ã³ã¹ããBOMãããã³ PCB é¢ç©ãåæž
- é»ç£ãšãã«ã®ãŒã«å¯ŸããæåºŠãæå€§ 134 åã® 1 ã«äœäž â ããå ç¢
- æ¯åã«å¯ŸããæåºŠã 10 åã® 1 ã«äœäž â ããå ç¢
- ããããé »åºŠã§å©çšå¯èœ - ãªãŒãã¿ã€ã ãéåžžã«çã
- 1 ã€ã® MEMS 補åã§åºãåšæ³¢æ°ç¯å²ãã«ããŒããèªå®äœæ¥ã軜æžããŸã