SiTime, Silicon MEMS Oscillators and Clock Generators

Thomas Kenny, Board Member and Chairman, TAB

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Thomas W. Kenny received the B.S. degree in physics from the University of Minnesota, Minneapolis, in 1983 and the M.S. and Ph.D. degrees in physics from the University of California, Berkeley, in 1987 and 1989, respectively.  From 1989 to 1993, he worked at the NASA Jet Propulsion Laboratory, where his research focused on the development of electron-tunneling high-resolution microsensors. In 1994, he joined the Mechanical Engineering Department, Stanford University, Stanford, CA, and directs MEMS-based research in a variety of areas including resonators, wafer-scale packaging, cantilever beam force sensors, microfluidics, and novel fabrication techniques for micromechanical structures. Professor Kenny is a founder of Cooligy, Inc., a microfluidics chip cooling components manufacturer. He is presently the Stanford Bosch Faculty Development Scholar and the General Chairman of the 2006 Hilton Head Solid State Sensor, Actuator, and Microsystems Workshop.  Professor Kenny has authored and co-authored over 200 scientific papers and holds 40 patents.